CMPA Filter Cartridges use a unique rolled structure which ensures the precise filtration of CMP slurry. It captures the large particles efficiently and lets the usable particles pass through. The graded pore size from outside to inside increases the dirt holding capacity and extend the filter service life.
An all polypropylene construction and
thermal bonding technology eliminates the
use of adhesives and enables the lowest
extraction level
The unique rolled structure provides accurate separation of CMP slurry, captures large particles and releases usable particles.
No Fiber Releasing
The special external mesh eliminates fibers
released from the filter.
Graded pore size structure eliminates the condensate slurry from blocking the membrane surface increasing the usability of porous area.
Filter Media | PP |
End cap /Core/Cage | PP |
Max. Operating Temperature | 80°C |
Max. Differential Pressure | 0.4 MPa / 21°C 0.24 MPa / 80°C |