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Chemphobic Ultrapure Chemical Filter

Cobetter Chemphobic Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, HNO3, SPM, SC1, and SC2. The PTFE membrane ensures excellent chemical compatibility with consistent particles removal for a wide range of acids, bases and other process chemicals. All fluorine construction minimizes metal extractable and other contaminants and provides high flow rates and extended service life to meet high filtration efficiency.  

Ultra-pure cleanliness reduces equipment set up time. Its one-piece structural design makes it easy to install and replace. Available in T, L and In-line configurations which simplify system design.




Application

  • Semiconductor

  • Wet etch and clean

  • Bulk chemicals



Feature

  • Excellent chemical compatibility

  • Higher flow rate and longer life time.

  • Ultra-low metal extractables.




  • Specification
  • Performance
  • Ordering Information


Product Specification

Membrane    PTFE 
Supports/Cage/Core/End Caps PFA
O-ringTEV or FFKM
Shell（Disposable onl）PFA
Max. Operating Temperature180°C
Max. Differential PressureCartridge 0.58MPa @25°C            Disposable 0.49MPa @ 25°C
Filter Areasø 68mm|                              ø 83mm

X1
X2Z1
Z2Z2

0.91 m²/10"1.21 m²/10"1.30 m²/10"
2.20 m²/10"3.00 m²/10"

    





Ordering Information


Cartridge

CHT1234567


Block 1Block 2Block 3Block 4Block 5

Diameter

Removal Ratings  

End Cap

Nominal Length   

O-ring Material

Z1=ø83mm

Z2=ø83mm

Z3=ø83mm

X1=ø68mm

X2=ø68mm


NM05=5nm

NM07=7nm

NM10=10nm

NM15=15nm

NM20=20nm

NM30=30nm

NM50=50nm

0010=0.1μm

0020=0.2μm

0045=0.45μm

0050=0.5μm

0100=1.0μm

0300=3.0μm

0500=5.0μm

1000=10μm

TC=Standard

       ø83mm/ø68mm

CLTC=For Cobetter PFA housing

       ø83mm/ø68mm

ETC=For E PFA housing

         ø83mm

TPCJ=For P PFA housing

          ø68mm

03=3"                  ø68mm

04=4"                  ø68mm

10=10"  ø83mm/ø68mm

20=20"  ø83mm/ø68mm

30=30"                ø83mm

P=TEV

K=FFKM

Block 6

Block 7
Cleanliness
Package 

XS=＜1 μg/device

S=＜3 μg/device

L=＜10 μg/device 

LV=Metal＜10μg/device,low anion

M=＜25μg/device

H=＜40μg/device 

E=Electronic grade 

C=Industrial grade 

7/10nm

7/10nm

7/10nm

10/15/20/30nm

ø68mm only

50nm 0.1/0.2/0.45/0.5/1/3/5/10μm

50nm 0.1/0.2/0.45/0.5/1/3/5/10μm

50nm 0.1/0.2/0.45/0.5/1/3/5/10μm

D=Dry

W=Prewet, UPW







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