Contaminants in gas are monitored in situ.
Monitoring Points | Values | 0.3 μm | 0.5 μm | eg1:
| Clean Air | 71
| 21
| Cleanroom (environment)
| 218287 | 67002 | After Filtration (air filtration) | 0 | 0 | eg2:
| Compressed Gas | 13194 | 3260 | Compressed Gas (environment)
| 521618 | 68972 | After Filtration (compressed air) | 0 | 0
|
|