Novacise^® Series are used to dilute acids, bases and other process chemicals as a cost-effective alternative for wet etch and clean applications.

The asymmetric PES membrane provides significant characteristics including high flow rates, high dirt holding capacity, and longer filter lifetime. In addition, the membrane structure reduces bubbles formation during flow.

Cobetter Novacise Filters have efficient particle retention and low metal extractables properties.In addition,these cartridges have high mechanical strength and are suitable for a wide variety of filtration processes.

Application

• Process: Wet Etch and Cleans

• Installation Point: Point of Tool

• Chemistry: Dilute acids (such as BOE/DHF/SC2); Dilute bases (such as SC1/TMAH); DIW

  
  

Feature

• Very high flow rates and longer life.

• Low extractables.

• Reduces equipment pre-operation time.

• Excellent retention;

• Manufactured in a cleanroom environment.

• 100% integrity tested