High Retention Rate Filter Cartridges · Electronic Grade
LPFPE Filter Cartridge Series

ELPF Filter Cartridges are composed of PTFE membrane. They are inherently hydrophobic and provide excellent organic and inorganic corrosion resistance. ELHPF Filter Cartridges are composed of hydrophilic PTFE membrane. They are recommended for the filtration of polar solvents. Since they require no pre-wetting, they can decrease operating time, thus helping to reduce cost.


Excellent Chemical Compatibility

Suitable for the filtration of a variety of wet-etching solutions and stripping agents from Wet Etch and Clean (WEC) Process.

High Retention Rates

Particle retention efficiency up to 99.99%.

Available in a Wide Range of Pore Sizes

Available in a wide range of pore sizes from 0.02μm to 10μm to meet different requirements.

Available in Hydrophilic PTFE Membrane

While PTFE membranes are inherently hydrophobic, ELHPF is composed of a hydrophilic membrane that requires no pre-wetting.

Each Element is Individually Integrity Tested

  • Specification
  • Performance
  • Ordering Information

Operating Conditions

Filter MediaHydrophobic PTFE Membrane
Cage/Core/End CapsHDPE
Max. Operating Temperature100°C
Max. Differential Pressure0.4 MPa / 21°C
0.24 MPa / 80°C
Filter Area0.02-0.2μm
5.0-10μm
0.74m² / 10 inch
0.98m² / 10 inch

Ordering Information

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