High Retention Rate Filter Cartridges Electronic Grade
ELPF/ELHPF Filter Cartridge Series

ELPF Filter Cartridges are composed of PTFE membrane. They are inherently hydrophobic and provide excellent organic and inorganic corrosion resistance. ELHPF Filter Cartridges are composed of hydrophilic PTFE membrane. They are recommended for the filtration of polar solvents. Since they require no pre-wetting, they can decrease operating time, thus helping to reduce cost.

Feature and Benefits

  • Excellent Chemical Compatibility

    Suitable for the filtration of a variety of wet-etching solutions and stripping agents from Wet Etch and Clean (WEC) Process.

  • High Retention Rates

    Particle retention efficiency up to 99.99%.

  • Available in Hydrophilic PTFE Membrane

    While PTFE membranes are inherently hydrophobic, ELHPF is composed of a hydrophilic membrane that requires no pre-wetting.

  • Available in a Wide Range of Pore Sizes

    Available in a wide range of pore sizes from 0.02μm to 10μm to meet different requirements.

  • Each Element is Individually Integrity Tested

  • Specification
  • Performance
  • Ordering Information

Operating Conditions


ELPFELHPF
Filter MediaHydrophobic
PTFE Membrane
Hydrophilic
PTFE Membrane
Cage/Core/End CapsPolypropylene
Max. Operating Temperature80°C
Max. Differential Pressure0.4 MPa / 21°C
0.24 MPa / 80°C
Removal Ratings0.02/0.05/0.1/0.2/
0.5/1.0/3.0/5.0/10
0.05/0.1/0.2/0.5/1.0/
3.0/5.0/10
Filter Area0.02-0.2μm 0.74 m² / 10 inch
5.0-10μm
0.74 m² / 10 inch
0.98 m² / 10 inch

Flow Rate Characteristics


ELPF Flow Rate Characteristics


Ordering Information

    Removal Ratings   End CapNominal LengthSeal Material  

ELPF        

0002=0.02μm0300=3.0μmSF=226 / Fin05= 5"P=FEP-E 

ELHPF

0003=0.03μm0500=5.0μmTC=222 / Flat10= 10"E=EPDM


0005=0.05μm1000=10.0μmTF=222 / Fin20= 20"



0010=0.1μm
SC=226 / Flat30= 30"



0020=0.2μm

40= 40"



0050=0.5μm






0100=1.0μm
















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