PSA Disposable Filter Cartridges are composed of specially-designed asymmetric HAPES membrane and high-purity PFA/HDPE material which makes them ideally suited for state-of-the-art semiconductor fabrication processes. The HAPES media is suitable for the filtration of aqueous solutions including HF/BOE/Developer. The specially-designed asymmetric structure of the membrane ensures pore size up to 2nm and high flow rates. High-purity PFA/HDPE and special rinse technology ensure low extractable and high cleanliness.

One-piece structural design results in this filter having a quick and efficient change-out making it easy-to-use. Each element is individually Integrity Tested.