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Home Flat Panel Display Chemicals DISP & SPFA Disposable Filter Cartridge Series
DISP & SPFA Disposable Filter Cartridge Series
Excellent Temperature & Corrosion Resistance Safe Handling & Quick Change-out

DISP Disposable Filter Cartridges utilize absolute graded pleated PTFE membrane which provides a high filtration efficiency and excellent chemical compatibility making it suitable for use in aggressive high temperature etch applications including SPM, SC1, and SC2.


SPFA Disposable Filter Cartridges are composed of high-purity PFA which results in high temperature and corrosion resistance. The small dimensions are ideal for laboratory scale filtration.


Excellent Chemical Compatibility

PTFE membrane combined with PFA structure results in high temperature and corrosion resistance. Ultra-pure material guarantees low metal extractables.


Pre-wetted Package

Available in a pre-wetted package for easy use


Each Element is Individually Integrity Tested


Precise Pore Sizes

Pore sizes for use in the semiconductor industry


High Flow Rates and Low Pressure Drops



  • Specification
  • Performance
  • Ordering Information


Materials of Construction



DISPSPFA
Filter MediumPTFEPTFE
Core/Cage/End CapsPFAPFA
Diameter126mm97mm
Overall Length< 430mm218mm
Max. Operating Temperature180°C95°C
Max. Different Pressure0.58MPa@25°C
0.097MPa@180°C		Forward  0.35MPa/25°C
Reverse  0.29MPa/25°C






Ordering Information



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