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Home Semiconductors Gas Solution Gasfender Ultra-pure Gas Cartridge Filter
Gasfender Ultra-pure Gas Cartridge Filter

GasfenderTM is constructed of electronic- grade stainless steel. It is specially designed for the inline gas filtration in the semiconductor process at high temperatures and pressures.


· High flow rates & low pressure drops

· Precise fine filtration @0.003μm

· Electronic-grade stainless steel construction includes internal electro-polishing

· Available in a wide range of sizes to meet all customer requirements

· Excellent chemical compatibility

· 100% helium leak test




  • Specification
  • Performance
  • Ordering Information


Operating Conditions

Filter MediumPTFE
Filter ConstructionPFA
Filter HousingStainless 316L
Removal Rating3nm
Fitting SpecSwagelok / VCR / NPT / Rc
Fitting Size1/4" / 3/8" / 1/2"
Max Operating Temperature170°C
Max. Operating Pressure

0.55MPa @121°C

0.34MPa @21°C


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