With retention ratings from 1nm to 5μm, Cobetter PhotopexTM UPE Filter Cartridges ensure excellent retention capabilities, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes.
Using its superior cleaning method, the high purity PE structure ensures cleanliness, low particle shedding and eliminates contaminants, thereby improving removal efficiency. In addition, the filter's large surface area provides high flow rates and extended service life.
Available in a wide variety of sizes and configurations to meet all your requirements. Please contact your Cobetter Sales Engineer for additional information.
Photoresist Filtration
Solvent Filtration
Photochemical Filtration
Wet Clean
Higher Efficiency
Higher Chemical Compatibility
Better Initial Cleanliness
Ultra-low Metal and Organic Extractables
| Cartridge | Capsule | |||
| Filter Membrane | Hydrophobic UPE | |||
| Cage/Core/End Caps | HDPE | |||
O-ring | TEV or EPDM | |||
| Shell （Capsule only） | HDPE | |||
| Max. Operating Temperature | 60°C | 38°C | ||
| Max. Operating Pressure | 0.34 MPa @ 25°C | 0.34 MPa @ 25°C | ||
| Filter Areas | X1 (ø68mm) | X2 (ø68mm) | Z1 (ø83mm) | Z1 (ø83mm) |
| 1.3 m²/10" | 1.8 m²/10" | 1.9 m²/10" | 2.6 m²/10" |
Ordering Information
Catridge
| PPU | 1 | 2 | OTC | 3 | 4 | 5 | 6 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | Block 6 |
Diameter | Removal Ratings | Nominal Length | O-ring Material | Cleanliness | Package |
X1=ø68mm X2=ø68mm Z1=ø83mm Z2=ø83mm | NM01=1nm NM02=2nm NM03=3nm NM05=5nm NM10=10nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm | 04=4" 10=10" 20=20" | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
Capsule
| PPU | 1 | 2 | 3 | 4 |
| Block 1 | Block 2 | Block 3 | Block 4 | |||
Removal Ratings | Fitting Type | Inlet/Outlet | Vent/Drain | O-ring Material | Package | |
NM01=1nm NM02=2nm NM03=3nm NM05=5nm NM10=10nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm | SW43E=SW SW44E=SW SW984E=SW PL54LE=CPL PL54ME=CPL NPT42E=NPT FL64E=CFL | 1/4" 1/4" 1/2" 8mm 8mm 1/4" 3/8" | 4mm 1/4" 1/4" 4mm 4mm 1/8" 1/4" | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW | |
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